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| Piezoelectoric Pipemorph Actiator | PZT Piezoelectric Thin Film on Titanium Wire with 100 microns in Diameter |
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(PH1)Development of Micro Cilium Actuators in Groupe
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In order to develope novel micro mobile robots or micro conveyer, micro cilium actuators in groupe which were composed of piezoelectric pipemorph arranged on a base plate was proposed.
By applying the electrostatic flocking, the hydrothermal method and the selective fabrication of externalelectrode, a prptotype of the actuator was fabricated and was examined.
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