In order to develop a new small motor with multi-DOF, a two-dimensional ultrasonic actuator, which was composed of a round bar of aluminum and four piezostacks attached on the bar perpendicular to each other and driven by a chopper control of input pulsive voltages,was developed. A rotiary-linearmotoer driven by a pair of th e two-dimensional ultrasonic actuators was developed and expermentally examined with a two-dimensional positioning control.
*We have collaborated with Mitsutoyo Co. Ltd. for this research.
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